@inproceedings{c34f8584802740b58e4a6e75237da1fe,
title = "Effect of joule heating on the performance of a piezoresistive micromechanical oscillator",
abstract = "Piezoresistive sensing has been regarded as an effective transduction method in MEMS resonator researches and piezoresistive micromechanical oscillators are therefore of great interests. The induced joule heating in the piezoresistive sensing, however, has a strong effect on the performance of the device. In this work, a micromechanical double ended tuning fork (DETF) based piezoresistive oscillator is studied. The results show the oscillation frequency drifts and the frequency stability decreases when the resonator body temperature increases due to the Joule heating. A linear trend between the minimum Allan deviation and the piezoresistive current is observed from the experiment.",
keywords = "Joule heating, Piezoresistive, frequency stability, micromechanical oscillator",
author = "Liu Xu and Xueyong Wei and Dong Pu and Zhuangde Jiang and Juan Ren",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 ; Conference date: 09-07-2017 Through 13-07-2017",
year = "2017",
month = oct,
day = "27",
doi = "10.1109/FCS.2017.8088860",
language = "英语",
series = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "253--256",
booktitle = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings",
}