Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier

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1 引用（Scopus）

源语言	英语
页（从-至）	441
页数	1
期刊	Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals
卷	14
期	3
出版状态	已出版 - 3月 2004

其它文件与链接

@article{60bf10484d5f4868a0132002b899cb87,

title = "Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier",

author = "Song, \{Zhong Xiao\} and Xu, \{Ke Wei\} and Hua Chen",

year = "2004",

month = mar,

language = "英语",

volume = "14",

pages = "441",

journal = "Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals",

issn = "1004-0609",

publisher = "Central South University ",

number = "3",

}

TY - JOUR

T1 - Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier

AU - Song, Zhong Xiao

AU - Xu, Ke Wei

AU - Chen, Hua

PY - 2004/3

Y1 - 2004/3

UR - https://www.scopus.com/pages/publications/2942696218

M3 - 文章

AN - SCOPUS:2942696218

SN - 1004-0609

VL - 14

SP - 441

JO - Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

JF - Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

IS - 3

ER -