Dynamic system modeling and simulation using bond graph based micro components library for micro electro-mechanical systems

To realize the coupled simulation of complex and heterogeneous micro electro-mechanical systems (MEMS) and to support MEMS top-down design flow, a micro electro-mechanical components template library was designed and implemented on the basis of the lumped sub-models which consist of the multiport field and junction structures of bond graphs. According to this library, a methodology of dynamic modeling and simulation of MEMS was also proposed. Employed structured design methodology and parametric simulation models, this template library can be used for rapid creating a simulation model at the conceptual level and system level. Every model in the library was mapped with a structural feature at the component level to support the redesign processes of MEMS via the space mapping among requirements, functions and structures. Taking a gap-closing actuator as a verification, the correspondent modeling and simulation process is demonstrated in terms of this library.