TY - JOUR
T1 - Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification
AU - Ou, Yan
AU - Yang, Qing
AU - Chen, Feng
AU - Deng, Zefang
AU - Du, Guangqing
AU - Wang, Jiuhong
AU - Bian, Hao
AU - Yong, Jiale
AU - Hou, Xun
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2015/11/1
Y1 - 2015/11/1
N2 - Reported here is the direct fabrication of the convex microlens arrays on poymethylmethacrylate using laser-induced structural modification. Based on single femtosecond pulse in situ modification, sixty thousand convex microlenses, whose diameters was <12μm , could be fabricated per minute, exhibiting much higher efficiency than conventional laser direct writing technique. The formation mechanism was mainly attributed to photodecomposition, which would result in the scission of polymer chains. The shape of microlenses could be tuned by the laser power. In addition, the good optical performance of the microlens was revealed by its ability of high resolution imaging. This technique may open up a new way of preparing low-cost and large-area convex structure which is widely used in many advanced microdevices, such as lab-on-chips and biomimetic compound eyes.
AB - Reported here is the direct fabrication of the convex microlens arrays on poymethylmethacrylate using laser-induced structural modification. Based on single femtosecond pulse in situ modification, sixty thousand convex microlenses, whose diameters was <12μm , could be fabricated per minute, exhibiting much higher efficiency than conventional laser direct writing technique. The formation mechanism was mainly attributed to photodecomposition, which would result in the scission of polymer chains. The shape of microlenses could be tuned by the laser power. In addition, the good optical performance of the microlens was revealed by its ability of high resolution imaging. This technique may open up a new way of preparing low-cost and large-area convex structure which is widely used in many advanced microdevices, such as lab-on-chips and biomimetic compound eyes.
KW - convex microlens arrays
KW - femtosecond laser
KW - single pulse structural modification
UR - https://www.scopus.com/pages/publications/84959345756
U2 - 10.1109/LPT.2015.2459045
DO - 10.1109/LPT.2015.2459045
M3 - 文章
AN - SCOPUS:84959345756
SN - 1041-1135
VL - 27
SP - 2253
EP - 2256
JO - IEEE Photonics Technology Letters
JF - IEEE Photonics Technology Letters
IS - 21
M1 - 7174471
ER -