Development of Single Diamond Substrate and Devices

Fabrication of large size single-crystal diamond and related devices attracts great efforts to make progress in diamond field. In this work, 2 inch single-crystal substrate has been developed and put into production. First, the temperature field in the MPCVD chamber was adjusted and made an uniform temperature distribution. Second, a growth of 2 inch diamond substrate has been carried out, and the XRD (004) FWHM indicates a low value of 91 arcsec. Based on the substrate, diamond RF and power MOSFETs have been developed, which meets the practical application. Also, the enhanced/depletion model logic circuit has been fabricated.