Development of bi-directional valve-less micropump for liquid

S. Matsumoto; A. Klein; R. Maeda

doi:10.1109/memsys.1999.746791

Development of bi-directional valve-less micropump for liquid

S. Matsumoto
, A. Klein
, R. Maeda

National Institute of Advanced Industrial Science and Technology

科研成果: 会议稿件 › 论文 › 同行评审

43 引用（Scopus）

摘要

A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.

源语言	英语
页	141-146
页数	6
DOI	https://doi.org/10.1109/memsys.1999.746791
出版状态	已出版 - 1999
已对外发布	是
活动	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA 期限: 17 1月 1999 → 21 1月 1999

会议

会议	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
市	Orlando, FL, USA
时期	17/01/99 → 21/01/99

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10.1109/memsys.1999.746791

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abstract = "A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.",

author = "S. Matsumoto and A. Klein and R. Maeda",

year = "1999",

doi = "10.1109/memsys.1999.746791",

language = "英语",

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note = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 17-01-1999 Through 21-01-1999",

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AU - Matsumoto, S.

AU - Klein, A.

AU - Maeda, R.

PY - 1999

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N2 - A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.

AB - A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.

UR - https://www.scopus.com/pages/publications/0032679342

U2 - 10.1109/memsys.1999.746791

DO - 10.1109/memsys.1999.746791

M3 - 论文

AN - SCOPUS:0032679342

SP - 141

EP - 146

T2 - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

Y2 - 17 January 1999 through 21 January 1999

ER -

Development of bi-directional valve-less micropump for liquid

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