Development of a MEMS-based micro combustor for micro gas turbine engine

X. C. Shan; Y. F. Jin; Z. F. Wang; C. K. Wong; Y. Murakoshi; R. Maeda

doi:10.1117/12.580783

Development of a MEMS-based micro combustor for micro gas turbine engine

X. C. Shan
, Y. F. Jin
, Z. F. Wang
, C. K. Wong
, Y. Murakoshi
, R. Maeda

Agency for Science, Technology and Research, Singapore
National Institute of Advanced Industrial Science and Technology

科研成果: 期刊稿件 › 会议文章 › 同行评审

1 引用（Scopus）

摘要

This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mm×21mm× 4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.

源语言	英语
文章编号	55
页（从-至）	337-344
页数	8
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5650
DOI	https://doi.org/10.1117/12.580783
出版状态	已出版 - 2005
已对外发布	是
活动	Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Sydney, 澳大利亚期限: 13 12月 2004 → 15 12月 2004

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abstract = "This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mm×21mm× 4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.",

keywords = "Gas turbine engine, Micro combustor, Reactive ion etching (DRIE) and fuel/air mixture",

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T1 - Development of a MEMS-based micro combustor for micro gas turbine engine

AU - Shan, X. C.

AU - Jin, Y. F.

AU - Wang, Z. F.

AU - Wong, C. K.

AU - Murakoshi, Y.

AU - Maeda, R.

PY - 2005

Y1 - 2005

N2 - This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mm×21mm× 4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.

AB - This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mm×21mm× 4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.

KW - Gas turbine engine

KW - Micro combustor

KW - Reactive ion etching (DRIE) and fuel/air mixture

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DO - 10.1117/12.580783

M3 - 会议文章

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VL - 5650

SP - 337

EP - 344

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 55

T2 - Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

Y2 - 13 December 2004 through 15 December 2004

ER -

Development of a MEMS-based micro combustor for micro gas turbine engine

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