TY - GEN
T1 - Development of a low-cost 8×8 optical switch using micro hot embossing
AU - Shan, X. C.
AU - Maeda, R.
N1 - Publisher Copyright:
© 2002 IEEE.
PY - 2002
Y1 - 2002
N2 - An 8×8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.
AB - An 8×8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.
UR - https://www.scopus.com/pages/publications/84963730840
U2 - 10.1109/OMEMS.2002.1031424
DO - 10.1109/OMEMS.2002.1031424
M3 - 会议稿件
AN - SCOPUS:84963730840
T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
SP - 21
EP - 22
BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Y2 - 20 August 2002 through 23 August 2002
ER -