Development of a Dual-Mass Integrated Quartz Vibrating Beam Accelerometer (I-QVBA) for Scale Factor Enhancement

This study focuses on the development of a high-scale factor Integrated Quartz Vibrating Beam Accelerometer (I-QVBA) to improve its scale factor and promote engineering implementation. Based on the theoretical frameworks of quartz double-ended tuning fork (DETF) resonance characteristics and inertial sensing principles, a novel I-QVBA with a dual pendulum-DETF assembly sensitive structure was proposed, along with its customized fabrication and packaging. Theoretical analysis and simulations verified that the innovative dual-pendulum DETF design inherently doubled the scale factor of the sensor (simulated: 400.54Hz/g). Comprehensive performance characterization revealed core specifications, including a ±3g input range, (0.49530 ± 0.00004) g zero bias, (348.402 ± 0.024)Hz/g actual scale factor, 4.2 μg resolution, 1.3 μg 0 g stability, 1.7 μg 1 g stability, 3.2 μg (1σ) short-term zero bias stability, and 2.3 ppm (1σ) short-term scale factor stability, all of which met the design requirements. These indicators demonstrate significant advantages over those reported in previous research. Overall, this study systematically explored and validated the dual-pendulum DETF assembly based QVBA, providing theoretical foundations and technical guidance for high-performance quartz resonant accelerometers.