TY - GEN
T1 - Developing MEMS electric current sensors for end-use monitoring of power supply
T2 - 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021
AU - Fan, Liqiang
AU - Wang, Dong F.
AU - Itoh, Toshihiro
AU - Yu, Zhongpeng
AU - Maeda, Ryutaro
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/8/25
Y1 - 2021/8/25
N2 - In our initial work of DTIP, a passive DC MEMS current sensor was proposed for single-wire or dual-wire current detection (DTIP2011, DTIP2012). A new type of oscillating MEMS DC current sensor, composed of an excitation element and a sensing element, was further proposed in DTIP2013. Since then, a series of studies, such as cantilever-based magnetic field sensor device (DTIP2014), corresponding relation between polarization and output voltage (DTIP2015), corresponding relationship between sensitivity and magnetic inductance (DTIP2017), magnetic field distribution surrounding three-phase four-wire appliances (DTIP2018), segmentation design and empirical analysis of piezoeletric layers (DTIP2018), as well as threshold-triggered current sensing (DTIP2019), have been carried out from different aspects. This work however, is oriented to realize an IEEE802.11g protocol compliant integratable dual-frequency coaxial microstrip antenna for wireless sensor networks. The newly designed antenna can be operated under two frequency bands of 2.45GHz and 5.2GHz, meeting the new physical layer standard IEEE802.11g emerged in recent years. A wireless cantilever current sensor (WCCS) is conceptualized to be an integration of a magnetic cantilever for sensing currents and a dual-frequency coaxial microstrip antenna for transmitting signals.
AB - In our initial work of DTIP, a passive DC MEMS current sensor was proposed for single-wire or dual-wire current detection (DTIP2011, DTIP2012). A new type of oscillating MEMS DC current sensor, composed of an excitation element and a sensing element, was further proposed in DTIP2013. Since then, a series of studies, such as cantilever-based magnetic field sensor device (DTIP2014), corresponding relation between polarization and output voltage (DTIP2015), corresponding relationship between sensitivity and magnetic inductance (DTIP2017), magnetic field distribution surrounding three-phase four-wire appliances (DTIP2018), segmentation design and empirical analysis of piezoeletric layers (DTIP2018), as well as threshold-triggered current sensing (DTIP2019), have been carried out from different aspects. This work however, is oriented to realize an IEEE802.11g protocol compliant integratable dual-frequency coaxial microstrip antenna for wireless sensor networks. The newly designed antenna can be operated under two frequency bands of 2.45GHz and 5.2GHz, meeting the new physical layer standard IEEE802.11g emerged in recent years. A wireless cantilever current sensor (WCCS) is conceptualized to be an integration of a magnetic cantilever for sensing currents and a dual-frequency coaxial microstrip antenna for transmitting signals.
KW - IEEE802.11g protocol
KW - Integratable
KW - dual-frequency coaxial microstrip antenna
KW - magnetic cantilever
KW - wireless cantilever current sensor (WCCS)
UR - https://www.scopus.com/pages/publications/85119064355
U2 - 10.1109/DTIP54218.2021.9568682
DO - 10.1109/DTIP54218.2021.9568682
M3 - 会议稿件
AN - SCOPUS:85119064355
T3 - 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021
BT - 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 25 August 2021 through 27 August 2021
ER -