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Determination of Young's modulus and internal stress from natural frequency of micro beam

科研成果: 期刊稿件文章同行评审

摘要

Young's modulus and internal stress of micro beams are determined from array of sensors made of silicic micro-cantilevers and optical fibers. Coupling of optical fibers is used to detect the transverse natural frequency of the silicic micro-cantilever. The method is effective for analyzing the mechanical property of microstructure.

源语言英语
页(从-至)55-58
页数4
期刊Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
34
5
出版状态已出版 - 5月 2000

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