Design of 3D ARROW based Mach-Zehnder pressure sensor

The BCB/SiO₂ vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient. The sensor consists of two stacked ARROW separated by the metal film and two 3 dB vertical coupler. The structure parameters of the ARROW are studied by the finite element method. The index distribution by the stress on the sensing arm is calculated to design the structure parameters. The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method (BPM). The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide. The device size is reduced without bend coupling waveguide and the pressure measurement is realized.