TY - GEN
T1 - Design and Test of Mems Resonant Pressure Sensor with A Novel Membrane Structure
AU - Zhang, Zichao
AU - Li, Cun
AU - Xue, Hong
AU - Hao, Le
AU - Bu, Kai
AU - Ai, Jiabin
AU - Zhao, Yulong
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - The limitations of quartz resonant pressure sensors are due to random errors caused by structural complexity and frequency temperature drift induced by thermal stress. This paper proposes an integrated metal-based pressure sensor structure with a sensitive membrane featuring thermal stress-isolation grooves. The innovative design reduces the temperature drift of the sensor's output frequency due to thermal stress, improves the stability of the sensor, and makes it suitable for high-precision applications.
AB - The limitations of quartz resonant pressure sensors are due to random errors caused by structural complexity and frequency temperature drift induced by thermal stress. This paper proposes an integrated metal-based pressure sensor structure with a sensitive membrane featuring thermal stress-isolation grooves. The innovative design reduces the temperature drift of the sensor's output frequency due to thermal stress, improves the stability of the sensor, and makes it suitable for high-precision applications.
KW - QDETF
KW - resonant pressure sensor
KW - temperature characteristics
KW - thermal stress-isolation groove
UR - https://www.scopus.com/pages/publications/85215270682
U2 - 10.1109/SENSORS60989.2024.10784876
DO - 10.1109/SENSORS60989.2024.10784876
M3 - 会议稿件
AN - SCOPUS:85215270682
T3 - Proceedings of IEEE Sensors
BT - 2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2024 IEEE Sensors, SENSORS 2024
Y2 - 20 October 2024 through 23 October 2024
ER -