Design and fabrication of plane valveless micropumps

Yu Feng Zhang; Guo Wei Zhang; Xiao Wei Liu; Wei Ping Chen; Xi Lian Wang; Wei Wang; He Nan Ni

Design and fabrication of plane valveless micropumps

Yu Feng Zhang
, Guo Wei Zhang
, Xiao Wei Liu
, Wei Ping Chen
, Xi Lian Wang
, Wei Wang
, He Nan Ni

Harbin Institute of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

源语言	英语
页（从-至）	936-939
页数	4
期刊	Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
卷	39
期	6
出版状态	已出版 - 6月 2007
已对外发布	是

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{894a7ca065f44e3cace282e406ea038d,

title = "Design and fabrication of plane valveless micropumps",

abstract = "A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.",

keywords = "Diffuser, MEMS, Nozzle, Valveless micropump",

author = "Zhang, \{Yu Feng\} and Zhang, \{Guo Wei\} and Liu, \{Xiao Wei\} and Chen, \{Wei Ping\} and Wang, \{Xi Lian\} and Wei Wang and Ni, \{He Nan\}",

year = "2007",

month = jun,

language = "英语",

volume = "39",

pages = "936--939",

journal = "Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology",

issn = "0367-6234",

publisher = "Harbin Institute of Technology",

number = "6",

}

TY - JOUR

T1 - Design and fabrication of plane valveless micropumps

AU - Zhang, Yu Feng

AU - Zhang, Guo Wei

AU - Liu, Xiao Wei

AU - Chen, Wei Ping

AU - Wang, Xi Lian

AU - Wang, Wei

AU - Ni, He Nan

PY - 2007/6

Y1 - 2007/6

N2 - A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

AB - A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

KW - Diffuser

KW - MEMS

KW - Nozzle

KW - Valveless micropump

UR - https://www.scopus.com/pages/publications/34447115590

M3 - 文章

AN - SCOPUS:34447115590

SN - 0367-6234

VL - 39

SP - 936

EP - 939

JO - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

JF - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

IS - 6

ER -

Design and fabrication of plane valveless micropumps

摘要

其它文件与链接

学术指纹

引用此