@inproceedings{15a83b97227449bc9fead11e2e5155ea,
title = "Design and evaluation of oil-filled isolated high temperature piezoresistive pressure sensor",
abstract = "This paper presents an oil-filled isolated high temperature piezoresistive pressure sensor with the pressure range of 0 - 60 MPa. The piezoresistive sensor chip with the size of 3 mm×3 mm×0.525 mm is fabricated using MEMS (Micro Electro-Mechanical System) and SOI (Silicon on Insulator) technologies. It is packaged on the glass with thickness of 0.5 mm by anodic bonding in vacuum environment. By high temperature oil-filled process, the sensor is fabricated with the sensor chip, corrugated diaphragm and mechanical base. The experimental results show that the accuracies of the sensor are better than 0.2\%FS (Full Scale) and the temperature drifts are less than 0.02\%FS°C-1 at 20 °C - 175 °C. Therefore, it can be used to measure the pressure reliably under high temperature in the fields of aerospace, petroleum and chemical industry, mobile and military industry etc.",
keywords = "Corrugated diaphragm, High temperature, MEMS, Oil-filled, Pressure sensor",
author = "Libo Zhao and Zhuangde Jiang and Yulong Zhao and Yuanhao Liu and Jianbo Li and Jingbo Xu and Yong Li",
year = "2010",
language = "英语",
isbn = "9781617820199",
series = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
pages = "100--103",
booktitle = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
note = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 ; Conference date: 05-09-2010 Through 09-09-2010",
}