Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners

Z. J. Wang; J. Tsaur; R. Maeda; H. Kokawa

Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners

Z. J. Wang
, J. Tsaur
, R. Maeda
, H. Kokawa

Tohoku University
National Institute of Advanced Industrial Science and Technology

科研成果: 会议稿件 › 论文 › 同行评审

1 引用（Scopus）

摘要

Lead zirconate titanate (Pb(Zr_0.52Ti_0.48)O ₃: PZT) thin films were prepared on Pt/Ti/SiO₂/Si substrates by hybrid processing: sol-gel method and laser ablation. The preferred orientation of the PZT films obtained by the hybrid process can be controlled using the seed layer obtained by the sol-gel method. The remnant polarization and the coercive field of this film were 28.6 μC/cm² and 58.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The devices of micro mirrors were successfully fabricated through the PZT film deposition, lithography cyclotron resonance (ECR), reactive ion etching (RIE) and inductively coupled plasma (ICP) releasing processes. The scanning angle was about 6 ± 2 degrees by resonating two beams with AC 5Vp-p at the resonance frequency of 1975 Hz. The results indicated that the piezoelectric PZT films deposited by the hybrid process have sufficient actuation capability for MEMS application.

源语言	英语
页	169-172
页数	4
出版状态	已出版 - 2005
已对外发布	是
活动	2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S) - Montreal, 加拿大期限: 23 8月 2004 → 27 8月 2004

会议

会议	2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S)
国家/地区	加拿大
市	Montreal
时期	23/08/04 → 27/08/04

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Wang, Z. J., Tsaur, J., Maeda, R., & Kokawa, H. (2005). Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners. 169-172. 论文发表于 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, 加拿大.

Wang, Z. J. ; Tsaur, J. ; Maeda, R. 等. / Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners. 论文发表于 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, 加拿大.4 页码

@conference{5b3368a940224850b368af75661ef6f4,

title = "Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners",

abstract = "Lead zirconate titanate (Pb(Zr0.52Ti0.48)O 3: PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by hybrid processing: sol-gel method and laser ablation. The preferred orientation of the PZT films obtained by the hybrid process can be controlled using the seed layer obtained by the sol-gel method. The remnant polarization and the coercive field of this film were 28.6 μC/cm2 and 58.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The devices of micro mirrors were successfully fabricated through the PZT film deposition, lithography cyclotron resonance (ECR), reactive ion etching (RIE) and inductively coupled plasma (ICP) releasing processes. The scanning angle was about 6 ± 2 degrees by resonating two beams with AC 5Vp-p at the resonance frequency of 1975 Hz. The results indicated that the piezoelectric PZT films deposited by the hybrid process have sufficient actuation capability for MEMS application.",

keywords = "Ferroelectric properties, Laser ablation, Lead zirconate titanate (PZT), Microscanner, Microstructure, Sol-gel method",

author = "Wang, \{Z. J.\} and J. Tsaur and R. Maeda and H. Kokawa",

year = "2005",

language = "英语",

pages = "169--172",

note = "2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S) ; Conference date: 23-08-2004 Through 27-08-2004",

}

Wang, ZJ, Tsaur, J, Maeda, R & Kokawa, H 2005, 'Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners', 论文发表于 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, 加拿大, 23/08/04 - 27/08/04 页码 169-172.

Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners. / Wang, Z. J.; Tsaur, J.; Maeda, R. 等.
2005. 169-172 论文发表于 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, 加拿大.

科研成果: 会议稿件 › 论文 › 同行评审

TY - CONF

T1 - Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners

AU - Wang, Z. J.

AU - Tsaur, J.

AU - Maeda, R.

AU - Kokawa, H.

PY - 2005

Y1 - 2005

N2 - Lead zirconate titanate (Pb(Zr0.52Ti0.48)O 3: PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by hybrid processing: sol-gel method and laser ablation. The preferred orientation of the PZT films obtained by the hybrid process can be controlled using the seed layer obtained by the sol-gel method. The remnant polarization and the coercive field of this film were 28.6 μC/cm2 and 58.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The devices of micro mirrors were successfully fabricated through the PZT film deposition, lithography cyclotron resonance (ECR), reactive ion etching (RIE) and inductively coupled plasma (ICP) releasing processes. The scanning angle was about 6 ± 2 degrees by resonating two beams with AC 5Vp-p at the resonance frequency of 1975 Hz. The results indicated that the piezoelectric PZT films deposited by the hybrid process have sufficient actuation capability for MEMS application.

AB - Lead zirconate titanate (Pb(Zr0.52Ti0.48)O 3: PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by hybrid processing: sol-gel method and laser ablation. The preferred orientation of the PZT films obtained by the hybrid process can be controlled using the seed layer obtained by the sol-gel method. The remnant polarization and the coercive field of this film were 28.6 μC/cm2 and 58.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The devices of micro mirrors were successfully fabricated through the PZT film deposition, lithography cyclotron resonance (ECR), reactive ion etching (RIE) and inductively coupled plasma (ICP) releasing processes. The scanning angle was about 6 ± 2 degrees by resonating two beams with AC 5Vp-p at the resonance frequency of 1975 Hz. The results indicated that the piezoelectric PZT films deposited by the hybrid process have sufficient actuation capability for MEMS application.

KW - Ferroelectric properties

KW - Laser ablation

KW - Lead zirconate titanate (PZT)

KW - Microscanner

KW - Microstructure

KW - Sol-gel method

UR - https://www.scopus.com/pages/publications/28144440776

M3 - 论文

AN - SCOPUS:28144440776

SP - 169

EP - 172

T2 - 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S)

Y2 - 23 August 2004 through 27 August 2004

ER -

Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners

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