@inproceedings{6b875bf0eada4337b2182774986b165b,
title = "Deposition and patterning technique for realization of PZT thick film micro actuator",
abstract = "The PZT layer deposition and patterning were performed by various methods and the electrical properties and process performances were evaluated. New deposition method on non-planar surface was presentcd and proved to be effective.",
author = "R. Maeda and J. Chu and A. Schroth and J. Akedo and M. Ichiki and Z. Wang and S. Yonekubo",
note = "Publisher Copyright: {\textcopyright} 1998 Institute of Electrical and Electronics Engineers Inc.. All rights reserved.; 1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
year = "1998",
doi = "10.1109/IMNC.1998.730068",
language = "英语",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "255",
editor = "Yoo, \{Hyung Joon\} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
}