TY - JOUR
T1 - Deep reactive ion etching of PZT ceramics and PMN-PT single crystals for high frequency ultrasound transducers
AU - Zhang, Junshan
AU - Ren, Wei
AU - Jing, Xinpan
AU - Shi, Peng
AU - Wu, Xiaoqing
N1 - Publisher Copyright:
© 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
PY - 2015/7/1
Y1 - 2015/7/1
N2 - Micromachining fabrication technique based on thick photoresist lithography and ICP enhanced deep reactive ion etching of PZT ceramics and PMN-PT single crystals has been investigated to fabricate 1-3 composite piezoelectric materials for high frequency ultrasound transducer applications. The experiment procedure includes thick photoresist patterned lithography, Ni hard mask electroplating and ICP enhanced deep reactive ion etching using chlorine gas. PZT ceramic pillars with a height of 43.78 μm and a sidewall angle of 78.9° were obtained. The optimized etching parameters for PZT ceramics were etching rate of 6.25 μm/h, and PZT/Ni etching selection ratio of 6.9. PMN-PT single crystal pillars with a height of 30.74 μm and a sidewall angle of 84.3° were obtained. The optimized etching parameters for PMN-PT were etching rate of 10.25 μm/h and PMN-PT/Ni etching selection ratio of 14. The 1-3 piezoelectric composites fabricated by PZT and PMN-PT pillars are promising materials for fabrication of high frequency ultrasound transducers.
AB - Micromachining fabrication technique based on thick photoresist lithography and ICP enhanced deep reactive ion etching of PZT ceramics and PMN-PT single crystals has been investigated to fabricate 1-3 composite piezoelectric materials for high frequency ultrasound transducer applications. The experiment procedure includes thick photoresist patterned lithography, Ni hard mask electroplating and ICP enhanced deep reactive ion etching using chlorine gas. PZT ceramic pillars with a height of 43.78 μm and a sidewall angle of 78.9° were obtained. The optimized etching parameters for PZT ceramics were etching rate of 6.25 μm/h, and PZT/Ni etching selection ratio of 6.9. PMN-PT single crystal pillars with a height of 30.74 μm and a sidewall angle of 84.3° were obtained. The optimized etching parameters for PMN-PT were etching rate of 10.25 μm/h and PMN-PT/Ni etching selection ratio of 14. The 1-3 piezoelectric composites fabricated by PZT and PMN-PT pillars are promising materials for fabrication of high frequency ultrasound transducers.
KW - 1-3 composite piezoelectric material
KW - High frequency ultrasound transducer
KW - ICP deep reactive ion etching
KW - Micromachining fabrication
UR - https://www.scopus.com/pages/publications/84937514036
U2 - 10.1016/j.ceramint.2015.03.258
DO - 10.1016/j.ceramint.2015.03.258
M3 - 文章
AN - SCOPUS:84937514036
SN - 0272-8842
VL - 41
SP - S656-S661
JO - Ceramics International
JF - Ceramics International
IS - S1
ER -