TY - GEN
T1 - Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer
AU - Zhang, Hongcai
AU - Wei, Xueyong
AU - Jiang, Zhuangde
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/26
Y1 - 2018/12/26
N2 - This paper presents a comparison study of three readout methods for a capacitive MEMS accelerometer, which is fabricated using standard SOI technology. Three readout methods, namely, capacitive-voltage convertor (CVC), capacitive-phase convertor (CPC) and sigma-delta modulator, are used in this study. The sensitivity and nonlinearity obtained from using each method are respectively, 10.1mV/g, 0.875deg/g, 3.1fF/g and 0.38%, 0.33%, 0.18%. The experimental results show that the circuit of CVC is relatively simple than the other two methods, and it has a better stability and lower noise among the three methods.
AB - This paper presents a comparison study of three readout methods for a capacitive MEMS accelerometer, which is fabricated using standard SOI technology. Three readout methods, namely, capacitive-voltage convertor (CVC), capacitive-phase convertor (CPC) and sigma-delta modulator, are used in this study. The sensitivity and nonlinearity obtained from using each method are respectively, 10.1mV/g, 0.875deg/g, 3.1fF/g and 0.38%, 0.33%, 0.18%. The experimental results show that the circuit of CVC is relatively simple than the other two methods, and it has a better stability and lower noise among the three methods.
KW - MEMS Accelerometer
KW - capacitive readout methods
KW - capacitive-phase convertor
KW - capacitive-voltage convertor
KW - sigma-delta modulator
UR - https://www.scopus.com/pages/publications/85060857241
U2 - 10.1109/ICSENS.2018.8589648
DO - 10.1109/ICSENS.2018.8589648
M3 - 会议稿件
AN - SCOPUS:85060857241
T3 - Proceedings of IEEE Sensors
BT - 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 17th IEEE SENSORS Conference, SENSORS 2018
Y2 - 28 October 2018 through 31 October 2018
ER -