@inproceedings{43fd025391e04d12b44aedfa681ee294,
title = "CCD evaluation for estimating measurement precision in lateral shearing interferometry",
abstract = "Because of larger measurement ability of wave-front deviation and no need of reference plat, the lateral shearing interferometry based on four step phase shifting has been widely used for wave-front measurement. After installation shearing interferograms are captured by CCD camera, and the actual phase data of wave-front can be calculated by four step phase shift algorithm and phase unwrapping. In this processing, the pixel resolution and gray scale of CCD camera is the vital factor for the measurement precision. In this paper, Based on the structure of lateral shearing surface interferometer with phase shifting, pixel resolution more or less for measurement precision is discussed. Also, the gray scale is 8 bit, 12 bit or 16 bit for measurement precision is illustrated by simulation.",
keywords = "Gray scale, Pixel resolution, Shearing interferometry, Simulation",
author = "Bingcai Liu and Bing Li and Ailing Tian and Baopeng Li",
year = "2013",
doi = "10.1117/12.2019073",
language = "英语",
isbn = "9780819495679",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013",
note = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 ; Conference date: 09-04-2013 Through 11-04-2013",
}