Bismuth pyrochlore films for dielectric applications

Bismuth pyrochlore ceramics have modest temperature coefficients of capacitance, good microwave properties, and can be prepared at relatively modest temperatures (approx. 900 - 1100°C). This work focuses on the preparation and characterization of thin films in this family for the first time. A sol-gel procedure using bismuth acetate in acetic acid and pyridine, in combination with zinc acetate dihydrate and niobium ethoxide in 2-methoxyethanol was developed. The solution chemistry was adjusted to prepare (Bi_1.5Zn_0.5)(Zn_0.5Nb_1.5)O₇ and Bi₂(Zn_1/3Nb_2/3)₂O₇ films. Solutions were spin-coated onto platinized Si substrates and crystallized by rapid thermal annealing. In both cases, crystallization occurred by 550°C into the cubic pyrochlore structure. (Bi_1.5Zn_0.5)(Zn_0.5Nb_1.5)O₇ films remained in the cubic phase up to crystallization temperatures of 750°C, while the structure of the Bi₂(Zn_1/3Nb_2/3)₂O₇ thin films is dependent of the firing temperature: cubic below 650°C and orthorhombic above 750°C. A mixture of cubic and orthorhombic structures is found at 700°C. The resulting BZN films are dense, uniform, and smooth (rms roughness of < 5 nm). Cubic bismuth zinc niobate films show dielectric constants up to 150, a negative temperature coefficient of capacitance, TCC, (approx. - 400 ppm/°C), tan δ < 0.01, and a field tunable dielectric constant. Orthorhombic films showed smaller dielectric constants (approx. 80), low tan δ (< 0.01), positive TCC, and field independent dielectric constants. TCC could be adjusted to new 0 ppm/°C using a mixture of orthorhombic and cubic material.