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BI-directional optical flow sensor for online microfluidic monitoring

  • Z. Yang
  • , S. Matsumoto
  • , J. Tsaur
  • , N. Ichikawa
  • , R. Maeda
  • Tokyo Metropolitan Industrial Technology Research Institute
  • National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

A novel bi-directional drag force flow sensor using a laser interferometer combined with a micromachined structure is reported. Based on a simple principle of momentum transfer, the on-chip sensing element could be made compact in size and compatible with other functional microfluidic components. Therefore, the proposed flow sensor has a great possibility for online monitoring of integrated microfluidic devices, for which existing flow sensors have not been readily applicable. A fast response capability and a wide linear dynamic range up to 85 μl/min with the lower detection limit of 0.3 μl/min were successfully demonstrated through experiments.

源语言英语
主期刊名Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
主期刊副标题9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
出版商Transducer Research Foundation
961-963
页数3
ISBN(印刷版)0974361119, 9780974361116
出版状态已出版 - 2005
已对外发布
活动9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, 美国
期限: 9 10月 200513 10月 2005

出版系列

姓名Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
1

会议

会议9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
国家/地区美国
Boston, MA
时期9/10/0513/10/05

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