Beam tracking of a five-dimensional processing system with independent control of laser spatial dimensions based on the vector method

Currently, microscopic inverted conical holes, grooves, and other structures with inverted cone angles are increasingly being utilized in aerospace equipment, medical devices, and other components. To meet the processing needs of such complex special-shaped microstructures, a novel laser processing system is developed which utilizing the complex differentiation, while relatively independent optical modules to achieve independent spatial five dimensional control of the focused laser beam. To verify the control range and the influencing factors of the focused beam space, the beam trajectory models of various complex optical modules are established using the effective vector method. Then, the overall model of the five-dimensional processing system is systematically constructed, and the impact of the motion of the optical module on the multidimensional spatial motion of the laser beam is analyzed. The results have revealed that the offset module mainly affects the angle between the focused beam and the optical axis, the beam expansion and focusing module mainly affects the depth change of the focus, and the scanning module mainly affects the scanning range of the focused beam. This study lays the theoretical foundation for the subsequent development of a five-dimensional processing system.