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Beam shaping system for laser-induced crystal growth

  • Fraunhofer Institute for Laser Technology
  • RWTH Aachen University
  • National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

We report on the development and setup of a beam shaping system for the Laser-Diode-Floating-Zone (LDFZ) crystal growth, a crucible-free technique used for growing high-purity crystals. The system takes a multi-kW diode laser beam with a rectangular intensity profile as an input. The intensity distribution is top-hat in the horizontal and gaussian-shaped in the vertical axis. The optical system contains a beam splitter unit, which divides the ingoing beam geometrically in 5 partial beams of equal power and size. By a two-lens imaging system, each partial beam is imaged onto the target plane by a magnification factor of 5. Adjustible mirrors of high purity fused silica allow for a radial irradiation of the sample, consequently resulting in a homogeneous heating and melting of the floating zone. After the setup and characterization, the optical system has been integrated into the existing LDFZ furnace at AIST, Tsukuba. First successful experiments on the LDFZ growth of β-Ga2O3 single crystals have been carried out, by which the crystal diameter could be scaled from 10 mm to 18 mm.

源语言英语
主期刊名Laser Resonators, Microresonators, and Beam Control XXV
编辑Vladimir S. Ilchenko, Andrea M. Armani, Julia V. Sheldakova
出版商SPIE
ISBN(电子版)9781510659193
DOI
出版状态已出版 - 2023
已对外发布
活动Laser Resonators, Microresonators, and Beam Control XXV 2023 - San Francisco, 美国
期限: 31 1月 20231 2月 2023

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
12407
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Laser Resonators, Microresonators, and Beam Control XXV 2023
国家/地区美国
San Francisco
时期31/01/231/02/23

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