Application of Micro/nanofabrication technologies in the Ultramicroelectrode fabrication

The fabrication procedure of ultramicroelectrodes (UMEs) based on micro/nanofabrication technologies is described at aspects of electrode materials, insulation materials, and the patterning of thin film. Micro/nanofabrication technologies can offer the controllable approach for the UMEs fabrication down to micro/ nanometer scale. Micro/nanofabrication technologies have been introduced to the single UMEs fabrication in an attempt to enable the reproducible construction of fine tips with exact geometries.