@inproceedings{a7bcfb9a52a442c5846d3f15745a7a4f,
title = "Application of dielectric elastomer planar actuators in a micropump chip",
abstract = "This paper presented a valveless micropump driven and sealed by dielectric elastomers (DEs). First, the planar DE actuator was designed and the diaphragm actuating performances were characterized. Then the micropump, containing a chamber and a pair of nozzle/diffuser, was fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 was sealed by adhesive tape and finally covered by a PMMA. The pumping and flow rate was tested and measure under high AC supply. Due to the undesirable durability, most micropumps were breakdown, and a maxim flow rate of 0.078ml/min was achieved under 4000V, 0.5Hz sine wave. The micropump is attractive but needs further investigation before any successful application.",
keywords = "Actuator, Dielectric elastomer, Micropump, SU-8",
author = "Xuanming Pang and Bo Li and Dongmei Xia and Sufang Jing",
year = "2009",
doi = "10.1109/ICIEA.2009.5138392",
language = "英语",
isbn = "9781424428007",
series = "2009 4th IEEE Conference on Industrial Electronics and Applications, ICIEA 2009",
pages = "1199--1202",
booktitle = "2009 4th IEEE Conference on Industrial Electronics and Applications, ICIEA 2009",
note = "2009 4th IEEE Conference on Industrial Electronics and Applications, ICIEA 2009 ; Conference date: 25-05-2009 Through 27-05-2009",
}