TY - GEN
T1 - An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System
AU - Wang, Chun
AU - Xu, Yutao
AU - Shao, Gang
AU - Lv, Junsheng
AU - Wei, Xueyong
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.
AB - MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.
UR - https://www.scopus.com/pages/publications/105018740987
U2 - 10.1109/NEMS67320.2025.11170103
DO - 10.1109/NEMS67320.2025.11170103
M3 - 会议稿件
AN - SCOPUS:105018740987
T3 - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
SP - 67
EP - 72
BT - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Y2 - 11 May 2025 through 14 May 2025
ER -