@inproceedings{950c05c352ee4b178bdf57f930d372f0,
title = "An instrument for measuring mechanical properties of MEMS materials by nanoindentation and micro-beam-bending",
abstract = "This paper presents an instrument for measuring the mechanical properties of MEMS materials by both nanoindentation and micro-beam-bending tests. The nanoindentation test requires high resolution within a very small displacement range, whereas the micro-beam-bending test needs relatively large displacement range but lower resolution. Though, for both tests, loading with small increment is necessary. In order to satisfy different requirements and yet save cost, a two-stage system driven by a PZT actuator in the first stage and by a DC-Mike Linear motor in the second stage is designed and built. The instrument achieves a displacement resolution better than 1 nm within a range of 50 microns in the first stage and the maximum output displacement is over 1 mm in the second stage. The measurement accuracy is validated through experiments.",
keywords = "Instrument, MEMS materials, Mechanical properties",
author = "Hairong Wang and Zexiang Zhao and Zhuangde Jiang and R. Du",
year = "2007",
doi = "10.1115/MNC2007-21421",
language = "英语",
isbn = "0791842657",
series = "Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007",
pages = "693--698",
booktitle = "Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007",
note = "International Conference on Integration and Commercialization of Micro and Nanosystems 2007 ; Conference date: 10-01-2007 Through 13-01-2007",
}