An active head slider using a piezoelectric cantilever for in-situ flying-height control

K. Suzuki; R. Maeda; J. Chu; T. Kato; M. Kurita

doi:10.1109/APMRC.2002.1037944

An active head slider using a piezoelectric cantilever for in-situ flying-height control

K. Suzuki
, R. Maeda
, J. Chu
, T. Kato
, M. Kurita

The University of Tokyo
National Institute of Advanced Industrial Science and Technology
University of Science and Technology of China
Hitachi, Ltd.

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

3 引用（Scopus）

摘要

This paper describes design and fabrication of MEMS-based active head sliders using piezoelectric unimorph cantilevers for in-situ flying-height control. Silicon sliders with PZT thin films were fabricated monolithically using a micromachining process. A deflection of more than 40 nm was obtained at the cantilever tip by applying a voltage of 4 V. Furthermore, an ABS (air bearing surface) design that makes the reduction of the aerodynamic reaction force possible during the head operation is discussed.

源语言	英语
主期刊名	Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	0780375092, 9780780375093
DOI	https://doi.org/10.1109/APMRC.2002.1037944
出版状态	已出版 - 2002
已对外发布	是
活动	Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002 - Singapore, 新加坡期限: 27 8月 2002 → 29 8月 2002

出版系列

姓名	Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

会议

会议	Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002
国家/地区	新加坡
市	Singapore
时期	27/08/02 → 29/08/02

访问文件

10.1109/APMRC.2002.1037944

其它文件与链接

链接到 Scopus 的出版物

引用此

Suzuki, K., Maeda, R., Chu, J., Kato, T., & Kurita, M. (2002). An active head slider using a piezoelectric cantilever for in-situ flying-height control. 在 Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002 文章 1037944 (Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APMRC.2002.1037944

@inproceedings{a4d584b56d8f41239232935e2c765439,

title = "An active head slider using a piezoelectric cantilever for in-situ flying-height control",

abstract = "This paper describes design and fabrication of MEMS-based active head sliders using piezoelectric unimorph cantilevers for in-situ flying-height control. Silicon sliders with PZT thin films were fabricated monolithically using a micromachining process. A deflection of more than 40 nm was obtained at the cantilever tip by applying a voltage of 4 V. Furthermore, an ABS (air bearing surface) design that makes the reduction of the aerodynamic reaction force possible during the head operation is discussed.",

keywords = "Hard Disks, Microactuators, Microelecto-mechanical Devices, Piezoelectric Films",

author = "K. Suzuki and R. Maeda and J. Chu and T. Kato and M. Kurita",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002 ; Conference date: 27-08-2002 Through 29-08-2002",

year = "2002",

doi = "10.1109/APMRC.2002.1037944",

language = "英语",

series = "Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002",

}

Suzuki, K, Maeda, R, Chu, J, Kato, T & Kurita, M 2002, An active head slider using a piezoelectric cantilever for in-situ flying-height control. 在 Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002., 1037944, Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002, Institute of Electrical and Electronics Engineers Inc., Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002, Singapore, 新加坡, 27/08/02. https://doi.org/10.1109/APMRC.2002.1037944

An active head slider using a piezoelectric cantilever for in-situ flying-height control. / Suzuki, K.; Maeda, R.; Chu, J. 等.
Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. 1037944 (Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - An active head slider using a piezoelectric cantilever for in-situ flying-height control

AU - Suzuki, K.

AU - Maeda, R.

AU - Chu, J.

AU - Kato, T.

AU - Kurita, M.

PY - 2002

Y1 - 2002

N2 - This paper describes design and fabrication of MEMS-based active head sliders using piezoelectric unimorph cantilevers for in-situ flying-height control. Silicon sliders with PZT thin films were fabricated monolithically using a micromachining process. A deflection of more than 40 nm was obtained at the cantilever tip by applying a voltage of 4 V. Furthermore, an ABS (air bearing surface) design that makes the reduction of the aerodynamic reaction force possible during the head operation is discussed.

AB - This paper describes design and fabrication of MEMS-based active head sliders using piezoelectric unimorph cantilevers for in-situ flying-height control. Silicon sliders with PZT thin films were fabricated monolithically using a micromachining process. A deflection of more than 40 nm was obtained at the cantilever tip by applying a voltage of 4 V. Furthermore, an ABS (air bearing surface) design that makes the reduction of the aerodynamic reaction force possible during the head operation is discussed.

KW - Hard Disks

KW - Microactuators

KW - Microelecto-mechanical Devices

KW - Piezoelectric Films

UR - https://www.scopus.com/pages/publications/84964519962

U2 - 10.1109/APMRC.2002.1037944

DO - 10.1109/APMRC.2002.1037944

M3 - 会议稿件

AN - SCOPUS:84964519962

T3 - Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

BT - Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

Y2 - 27 August 2002 through 29 August 2002

ER -

Suzuki K, Maeda R, Chu J, Kato T, Kurita M. An active head slider using a piezoelectric cantilever for in-situ flying-height control. 在 Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002. Institute of Electrical and Electronics Engineers Inc. 2002. 1037944. (Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002). doi: 10.1109/APMRC.2002.1037944

An active head slider using a piezoelectric cantilever for in-situ flying-height control

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