AlN cantilever for differential pressure sensor

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/ISAF.2013.6748705

AlN cantilever for differential pressure sensor

Yutaka Tomimatsu
, Hidetoshi Takahashi
, Takeshi Kobayashi
, Kiyoshi Matsumoto
, Isao Shimoyama
, Toshihiro Itoh
, Ryutaro Maeda

NMEMS Technology Research Organization
Seiko Group
The University of Tokyo
National Institute of Advanced Industrial Science and Technology

科研成果: 会议稿件 › 论文 › 同行评审

2 引用（Scopus）

摘要

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

源语言	英语
页	336-339
页数	4
DOI	https://doi.org/10.1109/ISAF.2013.6748705
出版状态	已出版 - 2013
已对外发布	是
活动	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 - Prague 4, 捷克共和国期限: 21 7月 2013 → 25 7月 2013

会议

会议	2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
国家/地区	捷克共和国
市	Prague 4
时期	21/07/13 → 25/07/13

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10.1109/ISAF.2013.6748705

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Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). AlN cantilever for differential pressure sensor. 336-339. 论文发表于 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, 捷克共和国. https://doi.org/10.1109/ISAF.2013.6748705

@conference{befdb5e62fc14c1fba92ea738173aeee,

title = "AlN cantilever for differential pressure sensor",

abstract = "The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm {\texttimes} 1000 μm {\texttimes} 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa",

keywords = "AlN, Differential pressure, Piezoelectri cantilever",

author = "Yutaka Tomimatsu and Hidetoshi Takahashi and Takeshi Kobayashi and Kiyoshi Matsumoto and Isao Shimoyama and Toshihiro Itoh and Ryutaro Maeda",

year = "2013",

doi = "10.1109/ISAF.2013.6748705",

language = "英语",

pages = "336--339",

note = "2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013 ; Conference date: 21-07-2013 Through 25-07-2013",

}

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, 'AlN cantilever for differential pressure sensor', 论文发表于 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013, Prague 4, 捷克共和国, 21/07/13 - 25/07/13 页码 336-339. https://doi.org/10.1109/ISAF.2013.6748705

TY - CONF

T1 - AlN cantilever for differential pressure sensor

AU - Tomimatsu, Yutaka

AU - Takahashi, Hidetoshi

AU - Kobayashi, Takeshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2013

Y1 - 2013

N2 - The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

AB - The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa

KW - AlN

KW - Differential pressure

KW - Piezoelectri cantilever

UR - https://www.scopus.com/pages/publications/84896365307

U2 - 10.1109/ISAF.2013.6748705

DO - 10.1109/ISAF.2013.6748705

M3 - 论文

AN - SCOPUS:84896365307

SP - 336

EP - 339

T2 - 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013

Y2 - 21 July 2013 through 25 July 2013

ER -

AlN cantilever for differential pressure sensor

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