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Ab initio modeling of Schottky-barrier height tuning by yttrium at nickel silicide/silicon interface

  • Li Geng
  • , Blanka Magyari-Kope
  • , Zhiyong Zhang
  • , Yoshio Nishi
  • Stanford University

科研成果: 期刊稿件文章同行评审

10 引用 (Scopus)

摘要

The mechanism of Schottky-barrier height (SBH) tuning by yttrium (Y) segregated at nickel silicide (NiSi2)/silicon interface is investigated based on first-principle calculations. SBH modification can be explained by a new chemical structure that forms when Y atoms substitute silicon atoms near the interface. Silicon dangling bonds are saturated, leading to a new pinning-free interfacial structure. When other layers of Y atoms are segregated in NiSi2, SBH for electrons can be reduced from 0.65 to 0.1 eV. The previously reported experimental phenomena can be explained by the calculations.

源语言英语
页(从-至)746-749
页数4
期刊IEEE Electron Device Letters
29
7
DOI
出版状态已出版 - 7月 2008

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