A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu; Hidetoshi Takahashi; Takeshi Kobayashi; Kiyoshi Matsumoto; Isao Shimoyama; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor

Yutaka Tomimatsu
, Hidetoshi Takahashi
, Takeshi Kobayashi
, Kiyoshi Matsumoto
, Isao Shimoyama
, Toshihiro Itoh
, Ryutaro Maeda

NMEMS Technology Research Organization
The University of Tokyo
National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

6 引用（Scopus）

摘要

This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O₃(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

源语言	英语
主期刊名	Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing
主期刊副标题	Sensing the Future, ISSNIP 2013
页	23-26
页数	4
DOI	https://doi.org/10.1109/ISSNIP.2013.6529757
出版状态	已出版 - 2013
已对外发布	是
活动	2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 - Melbourne, VIC, 澳大利亚期限: 2 4月 2013 → 5 4月 2013

出版系列

姓名	Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
卷	1

会议

会议	2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013
国家/地区	澳大利亚
市	Melbourne, VIC
时期	2/04/13 → 5/04/13

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10.1109/ISSNIP.2013.6529757

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Tomimatsu, Y., Takahashi, H., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). A wake-up switch using a piezoelectric differential pressure sensor. 在 Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 (页码 23-26). 文章 6529757 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; 卷 1). https://doi.org/10.1109/ISSNIP.2013.6529757

Tomimatsu, Yutaka ; Takahashi, Hidetoshi ; Kobayashi, Takeshi 等. / A wake-up switch using a piezoelectric differential pressure sensor. Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. 页码 23-26 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013).

@inproceedings{5f7c7b380f2f4fd787138a9d14921b9f,

title = "A wake-up switch using a piezoelectric differential pressure sensor",

abstract = "This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.",

author = "Yutaka Tomimatsu and Hidetoshi Takahashi and Takeshi Kobayashi and Kiyoshi Matsumoto and Isao Shimoyama and Toshihiro Itoh and Ryutaro Maeda",

year = "2013",

doi = "10.1109/ISSNIP.2013.6529757",

language = "英语",

isbn = "9781467355001",

series = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013",

pages = "23--26",

booktitle = "Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing",

note = "2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013 ; Conference date: 02-04-2013 Through 05-04-2013",

}

Tomimatsu, Y, Takahashi, H, Kobayashi, T, Matsumoto, K, Shimoyama, I, Itoh, T & Maeda, R 2013, A wake-up switch using a piezoelectric differential pressure sensor. 在 Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013., 6529757, Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, 卷 1, 页码 23-26, 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013, Melbourne, VIC, 澳大利亚, 2/04/13. https://doi.org/10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor. / Tomimatsu, Yutaka; Takahashi, Hidetoshi; Kobayashi, Takeshi 等.
Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. 页码 23-26 6529757 (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013; 卷 1).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A wake-up switch using a piezoelectric differential pressure sensor

AU - Tomimatsu, Yutaka

AU - Takahashi, Hidetoshi

AU - Kobayashi, Takeshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2013

Y1 - 2013

N2 - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

AB - This paper reports a wake-up switch using a piezoelectric differential pressure sensor in order to reduce the power consumption of a wireless sensor node. Air pressure change surrounding the sensor is detected by using a Pb(Zr, Ti)O3(PZT) thin film cantilever with the dimension of 1500 μm × 1000 μm × 2 μm. The sensor has high sensitivity with low power consumption due to its thin cantilever and low capacitance. The sensitivity was 2.4 mV/Pa from -30 Pa to 30 Pa. It was demonstrated that the fabricated sensor performed as a wake-up switch when pressure varies in 10 Pa with low power consumption.

UR - https://www.scopus.com/pages/publications/84881085308

U2 - 10.1109/ISSNIP.2013.6529757

DO - 10.1109/ISSNIP.2013.6529757

M3 - 会议稿件

AN - SCOPUS:84881085308

SN - 9781467355001

T3 - Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013

SP - 23

EP - 26

BT - Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing

T2 - 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013

Y2 - 2 April 2013 through 5 April 2013

ER -

Tomimatsu Y, Takahashi H, Kobayashi T, Matsumoto K, Shimoyama I, Itoh T 等. A wake-up switch using a piezoelectric differential pressure sensor. 在 Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013. 2013. 页码 23-26. 6529757. (Proceedings of the 2013 IEEE 8th International Conference on Intelligent Sensors, Sensor Networks and Information Processing: Sensing the Future, ISSNIP 2013). doi: 10.1109/ISSNIP.2013.6529757

A wake-up switch using a piezoelectric differential pressure sensor

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