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A smart, intermittent driven particle sensor with an airflow change trigger using a lead zirconate titanate (PZT) cantilever

  • Hidetoshi Takahashi
  • , Yutaka Tomimatsu
  • , Takeshi Kobayashi
  • , Akihiro Isozaki
  • , Toshihiro Itoh
  • , Ryutaro Maeda
  • , Kiyoshi Matsumoto
  • , Isao Shimoyama
  • The University of Tokyo
  • Seiko Group
  • NMEMS Technology Research Organization
  • National Institute of Advanced Industrial Science and Technology

科研成果: 期刊稿件文章同行评审

2 引用 (Scopus)

摘要

This paper reports on a smart, intermittent driven particle sensor with an airflow trigger. A lead zirconate titanate cantilever functions as the trigger, which detects an airflow change without requiring a power supply to drive the sensing element. Because an airflow change indicates that the particle concentration has changed, the trigger switches the optical particle counter from sleep mode to active mode only when the particle concentration surrounding the sensor changes. The sensor power consumption in sleep mode is 100 times less than that in the active mode. Thus, this intermittent driven method significantly reduces the total power consumption of the particle sensor. In this paper, we fabricate a prototype of the particle sensor and demonstrate that the optical particle counter can be switched on by the fabricated trigger and thus that the particle concentration can be measured.

源语言英语
文章编号025103
期刊Measurement Science and Technology
25
2
DOI
出版状态已出版 - 1 2月 2014
已对外发布

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