A Simple Optical Fiber-coupled Chromatic Confocal 3D Measurement System

Chromatic confocal measurement method can achieve accurate, efficient, and non-destructive three-dimensional measurement of almost any surface materials. At present, domestic research work in this area is mostly concentrated on theory and verification experiments, and there is a lack of relevant research on the design of an efficient integrated measurement system. This paper reports a simple optical fiber-coupled chromatic confocal three-dimensional measurement system, which uses a white-light confocal detection optical path and a wide-field optical path scheme. The system uses an aspheric lens to produce 1 mm axial chromatic aberration and realizes the combination of software and hardware. Through the measurement of step surface, MEMS, and glass thickness, it is shown that the built system is suitable for micron-level three-dimensional topography measurement of surfaces and thicknesses of transparent materials.