@inproceedings{b2559a9d93f540e4a301071682b0bbe3,
title = "A self-limited large-displacement-ratio micromechanical amplifier",
abstract = "A micromechanical amplifier with large-displacement-ratio and self-limited output as a result of bifurcation effect is reported in this paper. The large output displacement is achieved by amplifying a small input motion through the elastic deformation of the compliant configuration, which realizes the self-limited output by bifurcation effect. The configuration of the compliant microstructures is analyzed with the results of as high as 100 times displacement magnification and self-limitation by bifurcation effect, Such kind of amplifier is fabricated by employing deep reactive ion etching (DRIE) process demonstrating the 52.0-μm-output displacement when the input displacement is only 0.96 um with the displacement ratio of 54.2. Thereafter, the output displacement maintains stable due to the bifurcation effect.",
keywords = "Bifurcation effect, Large displacement ratio, Micromechanical amplifier, Self-Limited",
author = "J. Li and Liu, \{Z. S.\} and C. Lu and Zhang, \{Q. X.\} and Liu, \{A. Q.\}",
year = "2005",
doi = "10.1109/SENSOR.2005.1496519",
language = "英语",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "725--728",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}