@inproceedings{6ae754faf50a4576bada40cf465a12a6,
title = "A novel piezoresistive accelerometer featuring in-plane vibration",
abstract = "A novel approach is proposed for in-plane acceleration measurement using a novel clamped-beam structure as the sensing element. The working principle depends on the axially deformation of the sensing beam in the best location induced by in-plane acceleration. Theoretical analysis and finite element method simulations are employed to research the performance. The results demonstrate the feasibility and superiority of the structure used for in-plane acceleration measurement. The effects of the geometry parameters on the best location of the sensing beam, the sensitivity and the resonant frequency are also studied, which will contribute to the design and operation of the accelerometer featuring in-plane vibration.",
keywords = "accelerometer, clamped-beam structure, in-plane acceleration",
author = "Yu Xu and Libo Zhao and Zhuangde Jiang and Tingzhong Xu and Yulong Zhao",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014 ; Conference date: 18-06-2014 Through 20-06-2014",
year = "2014",
month = mar,
day = "13",
doi = "10.1109/EDSSC.2014.7061220",
language = "英语",
series = "2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014",
}