@inproceedings{18f6d11b71e244e1a07c510a060b3e39,
title = "A novel MEMS based infrared biosensor for ultra-sensitive detection of waterborne pathogens",
abstract = "In this paper, a new concept of MEMS based biosensor is presented as a promising solution for the ultra-low level and real time detection of waterborne pathogens. This novel infrared biosensor employs the SiGe/Si quantum well thermistor with a high TCR and low 1/f noise to achieve a high sensitive detection through its resistance change with the absorption of infrared radiation from the dark quencher. Meanwhile, a manufacturing process applying the adhesive wafer bonding is proposed.",
keywords = "Adhesive wafer bonding, Dark quencher, Quantum well, TCR, Waterborne pathogens",
author = "Lei Zhang and Tao Dong and Zhaochu Yang and Xinyan Zhao and Nils H{\o}ivik and Y. Yamamoto and Ch Wenger and B. Tillack",
year = "2012",
doi = "10.1109/RSETE.2012.6260364",
language = "英语",
isbn = "9781467308731",
series = "2012 2nd International Conference on Remote Sensing, Environment and Transportation Engineering, RSETE 2012 - Proceedings",
booktitle = "2012 2nd International Conference on Remote Sensing, Environment and Transportation Engineering, RSETE 2012 - Proceedings",
note = "2012 2nd International Conference on Remote Sensing, Environment and Transportation Engineering, RSETE 2012 ; Conference date: 01-06-2012 Through 03-06-2012",
}