A new hybrid piezo-actuated compliant mechanism with self-tuned flexure arm

Recent interests and demands for developing video-rate atomic force microscopes, high-throughput probe-based nanofabrication and high-frequency vibration generator for assisted-machining are increasingly posing new challenges for designing high-bandwidth and large-range piezo-actuated compliant mechanisms. The previous studies mainly focused on making the trade-off between natural frequency and motion range by designing a proper topology. Differing from the previous works, this paper attempts to break the deadlock by employing both piezo-stacks and piezoelectric patches to actuate compliant mechanisms. In this method, piezo-stacks provide an actuating force similar to the traditional way, while piezoelectric patches are bonded on the surface of the flexure arms in compliant mechanisms. These 'active' laminaes are used to further actuate the hosting flexural beam by inducing strains on the interface and then give additional bending moments to the flexural arms, which enlarge the output displacement of the compliant mechanism while without the sacrifice of natural frequency. An analytical formulation is established to illustrate the new driving principle and the compound static behaviour of a specific hybrid piezo-actuated multistage compliant mechanism. Initial prototype is also manufactured and experimentally testing is conducted to verify the feasibility of the method.