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A new error compensation strategy on Laser Displacement Sensor in free-form surface measurement

  • Xi'an Jiaotong University

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

The Laser Displacement Sensor is designed according to the principle of laser triangulation. It is a precise geometric measurement sensor, and it is characterized by non-contact and high measuring efficiency. However, the measurement accuracy of the LDS is easily influenced by other factors, especially for free-form surfaces where the incidence angle has greater impact on measurement accuracy and the research is relatively less. The paper proposes a new error compensation strategy and the method of calculating incidence angle. It can effectively improve the measurement accuracy of free-form surfaces by inclination error compensation. The experiment verifies the correctness and reliability of the error model by using a Laser Interferometer. The result shows that the measurement accuracy is less than 10μm.

源语言英语
主期刊名Optifab 2015
编辑Sebastian Stoebenau, Julie L. Bentley
出版商SPIE
ISBN(电子版)9781628418385
DOI
出版状态已出版 - 2015
活动Optifab 2015 - Rochester, 美国
期限: 12 10月 201515 10月 2015

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9633
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Optifab 2015
国家/地区美国
Rochester
时期12/10/1515/10/15

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