@inproceedings{56620d4e75c5433cba89ada5e95b2368,
title = "A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range",
abstract = "In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation, and then fabricated through a commercial silicon-on-insulator (SOI)-MEMS foundry process. The measured sensitivity can reach at least 858.6Hz/90° in the full range from 0°to 360°, which verifies the design concept. Based on this preliminary work, the sensitivity of re-designed tilt sensor is expected to reach 1700Hz/90° after an optimization.",
keywords = "DETF, MEMS resonant, tilt sensor",
author = "Shudong Wang and Juan Ren and Tianyi Zhang and Yinsheng Weng and Zhuangde Jiang and Xueyong Wei",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 15th IEEE Sensors Conference, SENSORS 2016 ; Conference date: 30-10-2016 Through 02-11-2016",
year = "2016",
month = jan,
day = "5",
doi = "10.1109/ICSENS.2016.7808792",
language = "英语",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IEEE Sensors, SENSORS 2016 - Proceedings",
}