A MEMS flow velocity sensor with low kinetic energy dissipation rate

Purpose - It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean populations and transmission of the ocean energy, especially the measurement of turbulence flow velocity. So, it is particularly urgent to provide a high-sensitivity, low-cost and reliable fluid flow sensor for industry and consumer product application. This paper aims to design a micro fluid flow sensor with a cross beam membrane structure. The designed sensor can detect the fluid flow velocity and has a low kinetic energy dissipation rate. Design/methodology/approach - In this paper, a micro fluid flow sensor with a cross beam membrane structure is designed to measure the ocean turbulence flow velocity. The design, simulation, fabrication and measurement of the designed sensor are discussed. By testing the simply packaged sensor in the fluid flow and analyzing the experiments data, the results show that the designed sensor has favorable performance. Findings - The paper describes the tests of the designed sensor, and the experimental results show that the designed sensor can measure the fluid flow velocity and has a sensitivity of 11.12 mV/V/(m/s)2 and a low kinetic energy dissipation rate in the range of 10-6-10-4 W/kg. Originality/value - This paper provides a micro-electro-mechanical systems fluid flow sensor used to measure ocean turbulence flow velocity.