@inproceedings{00b51303391545a9a4e20fc238799ced,
title = "A MEMS-based flow sensor with membrane cantilever beam array structure",
abstract = "This paper analyzed four different structures of flow sensor, the rectangular membrane cantilever beam array structure, the trapezoidal membrane cantilever beam array structure, the inverted trapezoidal membrane cantilever beam array structure and the triangular membrane cantilever beam array structure. The numerical and simulation results show that the inverted trapezoidal membrane cantilever beam array structure is the best among these four structures. The measuring range of the designed flow sensor and the effective optimization design are also discussed in this paper. The results reveal that the ideal measuring range of designed flow sensor is 0.3 m/s to 3.5 m/s.",
keywords = "MEMS, flow sensor, membrane cantilever beam array structure",
author = "Bian Tian and Huafeng Li and Ning Yang and Hanyue Liu and Yulong Zhao",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 ; Conference date: 09-04-2017 Through 12-04-2017",
year = "2017",
month = aug,
day = "25",
doi = "10.1109/NEMS.2017.8017002",
language = "英语",
series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "185--189",
booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
}