A High-Dynamic and Ultra-Low Pressure Sensor with a Novel Beam-Island-Membrane Structure

This paper presents a high-performance ultralow pressure sensor with a novel piezoresistive beam-islandmembrane structure to enhance the sensor's sensitivity and the natural frequency. The structure comprises a membrane, a beam, and several groups of islands. The sensor's sensitivity is efficiently increased by hollowing out the beam structure. Meanwhile, the islands are hollow to improve the dynamic performance. The sensor chip size is only 3 mm×3 mm×0.47 mm with a pressure range of 600 Pa, the sensitivity of 0.232 mV/Pa, and the natural frequency of 19.96 kHz. Compared with other reported ultra-low pressure sensors, the sensitivity and dynamic performance have been greatly improved. The proposed sensor provides an excellent candidate for lowpressure measurement fields, such as surgery diagnostic systems, space shuttle high-precision flight controls, and so on.