@inproceedings{be87e9cd1e7a4c109590a555aa903eda,
title = "A Double Node Thin-Film Thermocouples for In-Situ Measurement",
abstract = "The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5\% rhenium and tungsten with 26\% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02\%, providing application value for high-temperature in-situ sensing.",
keywords = "magnetrons, measurement, temperature, thermoelectricity",
author = "Rong Ma and Meiju Zhang and Zhongkai Zhang and Manguo Huang and Xiaobo Liang and Jiangjiang Liu and Zhaojun Liu and Bian Tian",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 International Conference on Automation, Robotics and Computer Engineering, ICARCE 2022 ; Conference date: 16-12-2022 Through 17-12-2022",
year = "2022",
doi = "10.1109/ICARCE55724.2022.10046476",
language = "英语",
series = "2022 International Conference on Automation, Robotics and Computer Engineering, ICARCE 2022",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 International Conference on Automation, Robotics and Computer Engineering, ICARCE 2022",
}