TY - GEN
T1 - A double-end fixed beam structure of MEMS piezoresistive high g accelerometer
AU - Jing, Liang
AU - Yulong, Zhao
AU - Zhengyong, Duan
AU - Xiuping, Tang
PY - 2011
Y1 - 2011
N2 - To satisfy the requirement of measuring high shock acceleration for hard target smart fuze, a double-end fixed beam structure of MEMS piezoresistive high g accelerometer is proposed. The designed sensor is based on the combination of Silicon on Insulator (SOI) solid piezoresistive material and Micro Electro Mechanical Systems (MEMS) technique. Based on the principle of the sensor, stress analysis and mode analysis of the accelerometer are performed with FEA (finite-element analysis), to determine the position of piezoresistor and ensure that the sensor will not be destroyed in the overload conditions. The test results, obtained by MAXITE machine and live ammunition test, show that the accelerometer can detect the acceleration of high shock successfully, and the measurement range of the accelerometer is higher than 50,000g.The designed accelerometer is ideal for the usage in the special test in high impact environments.
AB - To satisfy the requirement of measuring high shock acceleration for hard target smart fuze, a double-end fixed beam structure of MEMS piezoresistive high g accelerometer is proposed. The designed sensor is based on the combination of Silicon on Insulator (SOI) solid piezoresistive material and Micro Electro Mechanical Systems (MEMS) technique. Based on the principle of the sensor, stress analysis and mode analysis of the accelerometer are performed with FEA (finite-element analysis), to determine the position of piezoresistor and ensure that the sensor will not be destroyed in the overload conditions. The test results, obtained by MAXITE machine and live ammunition test, show that the accelerometer can detect the acceleration of high shock successfully, and the measurement range of the accelerometer is higher than 50,000g.The designed accelerometer is ideal for the usage in the special test in high impact environments.
KW - MEMS
KW - accelerometer
KW - high g
KW - piezoresistive effects
UR - https://www.scopus.com/pages/publications/79959872481
U2 - 10.1109/ICEICE.2011.5777913
DO - 10.1109/ICEICE.2011.5777913
M3 - 会议稿件
AN - SCOPUS:79959872481
SN - 9781424480395
T3 - 2011 International Conference on Electric Information and Control Engineering, ICEICE 2011 - Proceedings
SP - 2865
EP - 2868
BT - 2011 International Conference on Electric Information and Control Engineering, ICEICE 2011 - Proceedings
T2 - 2011 International Conference on Electric Information and Control Engineering, ICEICE 2011
Y2 - 15 April 2011 through 17 April 2011
ER -