TY - JOUR
T1 - A digital output accelerometer using MEMS-based piezoelectric accelerometer connected to parallel CMOS circuit
AU - Kobayashi, Takeshi
AU - Okada, Hironao
AU - Masuda, Takashi
AU - Maeda, Ryutaro
AU - Itoh, Toshihiro
PY - 2010
Y1 - 2010
N2 - We have developed digital output accelerometers composed of MEMS-based piezoelectric accelerometers and parallel CMOS inverters accompanied by capacitors with different capacitance. The digital output accelerometer was vibrated at acceleration range of 0-10 m/s2. The number of on-state CMOS inverter has increased with acceleration. Assuming that the on-state and off-state of CMOS inverters are "1" and "0", the present digital output accelerometers convert acceleration range of <1.0, 1.0-2.5, 2.5-5.0 and > 5 m/s2 into digital output of "000", "001", "011", and "111", respectively.
AB - We have developed digital output accelerometers composed of MEMS-based piezoelectric accelerometers and parallel CMOS inverters accompanied by capacitors with different capacitance. The digital output accelerometer was vibrated at acceleration range of 0-10 m/s2. The number of on-state CMOS inverter has increased with acceleration. Assuming that the on-state and off-state of CMOS inverters are "1" and "0", the present digital output accelerometers convert acceleration range of <1.0, 1.0-2.5, 2.5-5.0 and > 5 m/s2 into digital output of "000", "001", "011", and "111", respectively.
KW - Digital output
KW - MEMS
KW - PZT
KW - Piezoelectric accelerometer
KW - Wireless sensor netowrk
UR - https://www.scopus.com/pages/publications/78650622447
U2 - 10.1016/j.proeng.2010.09.295
DO - 10.1016/j.proeng.2010.09.295
M3 - 文章
AN - SCOPUS:78650622447
SN - 1877-7058
VL - 5
SP - 1071
EP - 1074
JO - Procedia Engineering
JF - Procedia Engineering
ER -