A beam-membrane structure micromachined differential pressure flow sensor

P. Chen; Y. L. Zhao; B. Tian; C. Li; Y. Y. Li

doi:10.1063/1.4919282

A beam-membrane structure micromachined differential pressure flow sensor

P. Chen
, Y. L. Zhao
, B. Tian
, C. Li
, Y. Y. Li

机械工程学院

Xi'an Jiaotong University

科研成果: 期刊稿件 › 文章 › 同行评审

5 引用（Scopus）

摘要

A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

源语言	英语
期刊论文编号	045004
期刊	Review of Scientific Instruments
卷	86
期	4
DOI	https://doi.org/10.1063/1.4919282
出版状态	已出版 - 1 4月 2015

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10.1063/1.4919282

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AB - A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

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A beam-membrane structure micromachined differential pressure flow sensor

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