2D micro scanner actuated by sol-gel derived double layered PZT

2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated [8]. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26±2 degrees and 24±2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.