微纳系统微区感应加热技术的研究进展

Dezhi Wu; Zhuo Chen; Zhenyin Hai; Liang Chen; Kun Ye; Lingyun Wang; Libo Zhao

doi:10.3969/j.issn.1004-132X.2022.01.001

微纳系统微区感应加热技术的研究进展

Dezhi Wu
, Zhuo Chen
, Zhenyin Hai
, Liang Chen
, Kun Ye
, Lingyun Wang
, Libo Zhao

仪器科学与技术学院

Xiamen University
Aviation Key Laboratory of Science and Technology on Inertial Technology

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

Micro-area induction heating(MIH), as a localized heating technique with characteristics of non-contact, controllable, and fast thermal-response, was shown numerous potentials in microsystems, such as microelectromechanical systems and microfluidic chips. The fundamentals of MIH were introduced herein, and the research progresses of MIH in the fields of packaging, driving, material growth, et al, was presented systematically. Furthermore, some existing technique problems needed to be solved were analyzed, and several prospective research directions of MIH were pointed out.

投稿的翻译标题	Research Progresses of Micro-area Induction Heating Technology in Micro/Nano Systems
源语言	繁体中文
页（从-至）	2-14 and 23
期刊	Zhongguo Jixie Gongcheng/China Mechanical Engineering
卷	33
期	1
DOI	https://doi.org/10.3969/j.issn.1004-132X.2022.01.001
出版状态	已出版 - 10 1月 2022

关键词

Induction heating
Localized heating
Microsystem
Packaging

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10.3969/j.issn.1004-132X.2022.01.001

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@article{8d2d6a6d12714cb58423f613b266f54a,

title = "微纳系统微区感应加热技术的研究进展",

abstract = "Micro-area induction heating(MIH), as a localized heating technique with characteristics of non-contact, controllable, and fast thermal-response, was shown numerous potentials in microsystems, such as microelectromechanical systems and microfluidic chips. The fundamentals of MIH were introduced herein, and the research progresses of MIH in the fields of packaging, driving, material growth, et al, was presented systematically. Furthermore, some existing technique problems needed to be solved were analyzed, and several prospective research directions of MIH were pointed out.",

keywords = "Induction heating, Localized heating, Microsystem, Packaging",

author = "Dezhi Wu and Zhuo Chen and Zhenyin Hai and Liang Chen and Kun Ye and Lingyun Wang and Libo Zhao",

year = "2022",

month = jan,

day = "10",

doi = "10.3969/j.issn.1004-132X.2022.01.001",

language = "繁体中文",

volume = "33",

pages = "2--14 and 23",

journal = "Zhongguo Jixie Gongcheng/China Mechanical Engineering",

issn = "1004-132X",

publisher = "Chinese Mechanical Engineering Society",

number = "1",

}

TY - JOUR

T1 - 微纳系统微区感应加热技术的研究进展

AU - Wu, Dezhi

AU - Chen, Zhuo

AU - Hai, Zhenyin

AU - Chen, Liang

AU - Ye, Kun

AU - Wang, Lingyun

AU - Zhao, Libo

PY - 2022/1/10

Y1 - 2022/1/10

N2 - Micro-area induction heating(MIH), as a localized heating technique with characteristics of non-contact, controllable, and fast thermal-response, was shown numerous potentials in microsystems, such as microelectromechanical systems and microfluidic chips. The fundamentals of MIH were introduced herein, and the research progresses of MIH in the fields of packaging, driving, material growth, et al, was presented systematically. Furthermore, some existing technique problems needed to be solved were analyzed, and several prospective research directions of MIH were pointed out.

AB - Micro-area induction heating(MIH), as a localized heating technique with characteristics of non-contact, controllable, and fast thermal-response, was shown numerous potentials in microsystems, such as microelectromechanical systems and microfluidic chips. The fundamentals of MIH were introduced herein, and the research progresses of MIH in the fields of packaging, driving, material growth, et al, was presented systematically. Furthermore, some existing technique problems needed to be solved were analyzed, and several prospective research directions of MIH were pointed out.

KW - Induction heating

KW - Localized heating

KW - Microsystem

KW - Packaging

UR - https://www.scopus.com/pages/publications/85123045691

U2 - 10.3969/j.issn.1004-132X.2022.01.001

DO - 10.3969/j.issn.1004-132X.2022.01.001

M3 - 文章

AN - SCOPUS:85123045691

SN - 1004-132X

VL - 33

SP - 2-14 and 23

JO - Zhongguo Jixie Gongcheng/China Mechanical Engineering

JF - Zhongguo Jixie Gongcheng/China Mechanical Engineering

IS - 1

ER -

微纳系统微区感应加热技术的研究进展

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