微机电火工品薄膜结构换能元

In order to meet the requirements of miniaturization, integration, and low energy of MEMS initiators, based on MEMS technology, a planar film structure energy conversion component with a "snake-shape" was designed. Using magnetic sputtering and other MEMS production technologies, we prepared energy conversion components with different resistive and base materials. Then, using scanning electron microscopy (SEM), atomic force microscopy (AFM), a low resistance tester, an infrared thermal imager, and other equipment, we obtained the characterization parameters and the performance of different element samples (such as the width, length, and thickness of the film bridge area and the resistance, electro-thermal response, etc.). Through analysis and study, the influences of the resistive material, base material, thickness of the film, and bridge shape with the performance of the energy conversion component were obtained; metal Pt and 7740 glass was preferred, which ignite at 5 V/33 μF, and meet the low-energy requirements of MEMS initiators.